JPS6282513A - デイスク部材の洗浄装置 - Google Patents

デイスク部材の洗浄装置

Info

Publication number
JPS6282513A
JPS6282513A JP22113885A JP22113885A JPS6282513A JP S6282513 A JPS6282513 A JP S6282513A JP 22113885 A JP22113885 A JP 22113885A JP 22113885 A JP22113885 A JP 22113885A JP S6282513 A JPS6282513 A JP S6282513A
Authority
JP
Japan
Prior art keywords
section
cleaning
disk member
disk
handler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22113885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572011B2 (en]
Inventor
Kazuhiko Kenmori
権守　和彦
Nobuo Morita
森田　宣夫
Takashi Hibiya
隆 日比谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP22113885A priority Critical patent/JPS6282513A/ja
Publication of JPS6282513A publication Critical patent/JPS6282513A/ja
Publication of JPH0572011B2 publication Critical patent/JPH0572011B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP22113885A 1985-10-05 1985-10-05 デイスク部材の洗浄装置 Granted JPS6282513A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22113885A JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22113885A JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Publications (2)

Publication Number Publication Date
JPS6282513A true JPS6282513A (ja) 1987-04-16
JPH0572011B2 JPH0572011B2 (en]) 1993-10-08

Family

ID=16762053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22113885A Granted JPS6282513A (ja) 1985-10-05 1985-10-05 デイスク部材の洗浄装置

Country Status (1)

Country Link
JP (1) JPS6282513A (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02251288A (ja) * 1989-03-22 1990-10-09 Toshiba Corp 洗浄装置
JPH0313600A (ja) * 1989-06-12 1991-01-22 Daicel Chem Ind Ltd スタンパー洗浄装置
US5826292A (en) * 1996-06-27 1998-10-27 Speedfam Co., Ltd. Disk cleaning and drying apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127234A (ja) * 1982-12-30 1984-07-23 Fujitsu Ltd 円板自動処理装置
JPS6093119A (ja) * 1983-10-28 1985-05-24 Mazda Motor Corp エンジンの吸気装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59127234A (ja) * 1982-12-30 1984-07-23 Fujitsu Ltd 円板自動処理装置
JPS6093119A (ja) * 1983-10-28 1985-05-24 Mazda Motor Corp エンジンの吸気装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02251288A (ja) * 1989-03-22 1990-10-09 Toshiba Corp 洗浄装置
JPH0313600A (ja) * 1989-06-12 1991-01-22 Daicel Chem Ind Ltd スタンパー洗浄装置
US5826292A (en) * 1996-06-27 1998-10-27 Speedfam Co., Ltd. Disk cleaning and drying apparatus

Also Published As

Publication number Publication date
JPH0572011B2 (en]) 1993-10-08

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